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Micro and Smart System Technology: Architecture, Fabrication, and Applications

"Micro and smart system technology integrates micro-scale mechanical, optical, chemical, or fluidic elements with microelectronic processing circuits and embedded software. This technology enables miniaturized devices to sense environmental signals, process data locally, make real-time intelligent decisions, and execute physical or digital outputs within a single unified chip or compact multi-chip module. Architectural Foundations of Micro and Smart Systems A smart microsystem is more than a simple sensor. While traditional Microelectromechanical Systems (MEMS) convert a physical quantity into an electrical signal, a smart system combines that..."

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